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Slumping of Si wafers at high temperature
- 1.Míka, M., Jankovský, O., Šimek, P., Lutyakov, O., Havlíková, R., Šofer, Z., Hudec, R., Pína, L., Inneman, A., Švéda, L., Maršíková, V. Slumping of Si wafers at high temperature. In: JUHA, L., BAJT, S., LONDON, R., HUDEC, R., PÍNA, L., eds. Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III. Bellingham: SPIE, 2013. Proceedings of SPIE, 8777. ISBN 9780819495792. Available: doi: 10.1117/12.2021586
Number of the records: 1