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Some Other Gratings: Benchmarks for Large-Area E-Beam Nanopatterning
- 1.Meluzín, P., Horáček, M., Urbánek, M., Bok, J., Krátký, S., Matějka, M., Chlumská, J., Kolařík, V. Some Other Gratings: Benchmarks for Large-Area E-Beam Nanopatterning. In: NANOCON 2014. 6th International conference proceedings. Ostrava: TANGER, 2014. ISBN 978-80-87294-55-0.
Number of the records: 1