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Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures

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    Urbánek, M., Matějka, M., Kolařík, V., Horáček, M., Krátký, S., Bok, J., Chlumská, J., Mikšík, P., Vašina, J. Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures. In: 39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. Cambridge: University of Cambridge, 2013, s. 582.
Number of the records: 1