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AFM nanometrology interferometric system with the compensation of angle errors
- 1.Hrabina, J., Lazar, J., Klapetek, P., Číp, O. AFM nanometrology interferometric system with the compensation of angle errors. In: Optical Measurement Systems for Industrial Inspection VII (Proceedings of SPIE Vol. 8082). Bellingham: SPIE, 2011, 80823U:1-6. ISBN 978-0-8194-8678-3. Available: doi: 10.1117/12.889544
Number of the records: 1