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Multidimensional interferometric tool for the local probe microscopy nanometrology

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    Hrabina, J., Lazar, J., Klapetek, P., Číp, O. Multidimensional interferometric tool for the local probe microscopy nanometrology. Measurement Science and Technology. 2011, 22(9), 094030:1-8. ISSN 0957-0233. E-ISSN 1361-6501. Available: doi: 10.1088/0957-0233/22/9/094030
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