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Control of tin oxide film morphology by addition of hydrocarbons to the chemical vapour deposition process
- 1.Yates, H.M., Evans, P., Sheel, D.W., Remeš, Z., Vaněček, M. Control of tin oxide film morphology by addition of hydrocarbons to the chemical vapour deposition process. Thin Solid Films. 2010, 519(4), 1334-1340. ISSN 0040-6090. E-ISSN 1879-2731. Available: doi: 10.1016/j.tsf.2010.09.037
Number of the records: 1