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Effect of Hydrogen on the Properties of Amorphous Carbon Nitride Films
- 1.Mikmeková, E., Urbánek, M., Fořt, T., Di Mundo, R. Effect of Hydrogen on the Properties of Amorphous Carbon Nitride Films. In: 2010 International Conference on Manufacturing Science and Technology (ICMST 2010). Chengdu: Institute of Electrical and Electronics Engineers, Inc, 2010, s. 291-295. ISBN 978-1-4244-8759-2.
Number of the records: 1