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Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model
- 1.Navrátil, Z., Dvořák, P., Brzobohatý, O., Trunec, D. Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model. Journal of Physics D-Applied Physics. 2010, 43(Nov 3), 505203:1-11. ISSN 0022-3727. E-ISSN 1361-6463. Available: doi: 10.1088/0022-3727/43/50/505203
Number of the records: 1