A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength

Wachulak, P.W., Bartnik, A., Fiedorowicz, H., Feigl, T., Jarocki, R., Kostecki, J., Rudawski, P., Sawicka, M., Szczurek, M., Szczurek, A., Zawadzki, Z. A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength. Applied Physics B-Lasers and Optics. 2010, 100(3), 461-469. ISSN 0946-2171. E-ISSN 1432-0649. Available: doi: 10.1007/s00340-010-4076-9