Deposition of hard thin films from HMDSO in atmospheric pressure dielectric barrier discharge

Trunec, D., Zajíčková, L., Bursíková, V., Studnička, F., Sťahel, P., Prysiazhnyi, V., Peřina, V., Houdková, J., Navrátil, Z., Franta, D. Deposition of hard thin films from HMDSO in atmospheric pressure dielectric barrier discharge. Journal of Physics D-Applied Physics. 2010, 43(22), 225403/1-225403/8. ISSN 0022-3727. E-ISSN 1361-6463. Available: doi: 10.1088/0022-3727/43/22/225403