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Role of the tip induced local anodic oxidation in the conductive atomic force microscopy of mixed phase silicon thin films
- 1.Vetushka, A., Fejfar, A., Ledinský, M., Rezek, B., Stuchlík, J., Kočka, J. Role of the tip induced local anodic oxidation in the conductive atomic force microscopy of mixed phase silicon thin films. Physica Status Solidi C. 2010, 7(3-4), 728-731. ISSN 1862-6351. Available: doi: 10.1002/pssc.200982777.
Number of the records: 1