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Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide
- 1.Novotný, M., Bulíř, J., Pokorný, P., Bočan, J., Fitl, P., Lančok, J., Musil, J. Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide. Journal of Optoelectronics and Advanced Materials. 2010, 12(3), 697-700. ISSN 1454-4164. E-ISSN 1841-7132.
Number of the records: 1