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Deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films by double RF hollow cathode plasma jet system

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    Hubička, Z., Virostko, P., Tichý, M., Čada, M., Adámek, P., Olejníček, J., Deyneka, A., Churpita, O., Valvoda, V., Jastrabík, L. Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system. Contributions to Plasma Physics. 2008, 48(5-7), 515-520. ISSN 0863-1042. E-ISSN 1521-3986. Available: doi: 10.1002/ctpp.200810083
Number of the records: 1