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Electrical probe diagnostics of the hollow cathode plasma jet system for deposition of TiO.sub.x./sub. thin films
- 1.Virostko, P., Hubička, Z., Čada, M., Adámek, P., Kment, Š., Tichý, M., Jastrabík, L. Electrical probe diagnostics of the hollow cathode plasma jet system for deposition of TiOx thin films. Contributions to Plasma Physics. 2008, 48(5-7), 527-533. ISSN 0863-1042. E-ISSN 1521-3986. Available: doi: 10.1002/ctpp.200810085
Number of the records: 1