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The interaction of the supersonic plasma - jet with substrate in the RF plasma-chemical reactor
- 1.Šícha, M., Hubička, Z., Tichý, M., Novák, M., Soukup, L., Jastrabík, L., Behnke, J. F., Kapička, V., Kapoun, K., Šerý, M. The interaction of the supersonic plasma - jet with substrate in the RF plasma-chemical reactor. Contributions to Plasma Physics. 1996, 36(5), 605-611. ISSN 0863-1042. E-ISSN 1521-3986.
Number of the records: 1