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Recovery of Waste Semiconductors for CVD Precursors.
- 1.BUMBA, J., DYTRYCH, P., FAJGAR, R., DŘÍNEK, V. Recovery of Waste Semiconductors for CVD Precursors. In: VESELÝ, M., HRDLIČKA, Z., HANIKA, J., LUBOJACKÝ, J., eds. Proceedings of the 6th International Conference on Chemical Technology. Prague: Czech Society of Industrial Chemistry, 2018, s. 427-431. ISBN 978-80-86238-77-7. ISSN 2336-8128.
Number of the records: 1