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Thin nitride layers as permeation barriers

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    VEVERKA, J., MATĚJÍČEK, J., LUKÁČ, F., POSPÍŠIL, D., CVRČEK, L., NEMANIČ, V. Thin nitride layers as permeation barriers. In: KOUBSKÝ, Tomáš, ed. Acta Polytechnica CTU Proceedings. Praha: České vysoké učení technické v Praze, 2018, s. 24-29. ISBN 978-80-01-06459-7. ISSN 2336-5382. Available: https://ojs.cvut.cz/ojs/index.php/APP/issue/view/641
Number of the records: 1  

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