Damage accumulation and structural modification in c-plane and a-plane GaN implanted with 400 keV Kr and Gd ions

MACKOVÁ, A., MALINSKÝ, P., JAGEROVÁ, A., SOFER, Z., KLÍMOVÁ, K., SEDMIDUBSKÝ, D., MIKULICS, M., BOTTGER, R., AKHMADALIEV, S. Damage accumulation and structural modification in c-plane and a-plane GaN implanted with 400 keV Kr and Gd ions. Surface and Coatings Technology. 2018, 355(SI), 22-28. ISSN 0257-8972. Available: doi: 10.1016/j.surfcoat.2018.02.097