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Towards high quality ITO coatings: the impact of nitrogen admixture in HiPIMS discharges
- 1.STRAŇÁK, V., BOGDANOWICZ, R., SEZEMSKY, P., WULFF, H., KRUTH, A., SMIETANA, M., KRATOCHVÍL, J., ČADA, M., HUBIČKA, Z. Towards high quality ITO coatings: the impact of nitrogen admixture in HiPIMS discharges. Surface and Coatings Technology. 2018, 335(Feb), 126-133. ISSN 0257-8972. Available: doi: 10.1016/j.surfcoat.2017.12.030
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