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kW-class picosecond thin-disc prepulse laser Perla for efficient EUV generation
- 1.ENDO, A., SMRŽ, M., MUŽÍK, J., NOVÁK, O., CHYLA, M., MOCEK, T. kW-class picosecond thin-disc prepulse laser Perla for efficient EUV generation. Journal of Micro-Nanolithography MEMS and MOEMS. 2017, 16(4), 1-6), 041011. ISSN 1932-5150. E-ISSN 1932-5134. Available: doi: 10.1117/1.JMM.16.4.041011
Number of the records: 1