Enhanced oxidation of TiO.sub.2./sub. films prepared by high power impulse magnetron sputtering running in metallic mode

STRAŇÁK, V., KRATOCHVÍL, J., OLEJNÍČEK, J., KŠÍROVÁ, P., SEZEMSKY, P., ČADA, M., HUBIČKA, Z. Enhanced oxidation of TiO₂ films prepared by high power impulse magnetron sputtering running in metallic mode. Journal of Applied Physics. 2017, 121(17), 1-9), 171914. ISSN 0021-8979. E-ISSN 1089-7550. Available: doi: 10.1063/1.4977825