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A micro-scale hot wire anemometer based on low stress (Ni/W) multi-layers deposited on nano-crystalline diamond for air flow sensing
- 1.TALBI, A., GIMENO, L., GERBEDOEN, J.-C., VIARD, R., SOLTANI, A., MORTET, V., PREOBRAZHENSKY, V., MERLEN, A., PERNOD, P. A micro-scale hot wire anemometer based on low stress (Ni/W) multi-layers deposited on nano-crystalline diamond for air flow sensing. Journal of Micromechanics and Microengineering. 2015, 25(2), 1-8), 125029. ISSN 0960-1317. E-ISSN 1361-6439. Available: doi: 10.1088/0960-1317/25/12/125029
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