Multitarget sputtering of PZT-containing mixed oxide thin films onto copper-coated kapton substrates

KLEINER, A., SUCHANECK, G., DEJNEKA, A., JASTRABÍK, L., LAVRENTEV, V., KISELEV, D.A., GERLACH, G. Multitarget sputtering of PZT-containing mixed oxide thin films onto copper-coated kapton substrates. In: SHPOTYUK, M.V., ed. Proceedings of International Conference On Oxide Materials For Electronic Engineering (OMEE). New York: IEEE, 2014, s. 19-20, č. článku 6912320. ISBN 978-1-4799-5961-7. Available: doi: 10.1109/OMEE.2014.6912320.