Number of the records: 1
Slumping of Si wafers at high temperature
- 1.MÍKA, M., JANKOVSKÝ, O., ŠIMEK, P., LUTYAKOV, O., HAVLÍKOVÁ, R., ŠOFER, Z., HUDEC, R., PÍNA, L., INNEMAN, A., ŠVÉDA, L., MARŠÍKOVÁ, V. Slumping of Si wafers at high temperature. In: JUHA, L., BAJT, S., LONDON, R., HUDEC, R., PÍNA, L., eds. Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III. Bellingham: SPIE, 2013. Proceedings of SPIE, 8777. ISBN 9780819495792. Available: doi: 10.1117/12.2021586
Number of the records: 1