Multitarget sputtering of piezoelectric mixed oxide thin films onto flexible substrates

KLEINER, A., SUCHANECK, G., DEJNEKA, A., JASTRABÍK, L., LAVRENTIEV, V., KISELEV, D.A., GERLACH, G. Multitarget sputtering of piezoelectric mixed oxide thin films onto flexible substrates. In: UBIZSKII, S., VASYLECHKO, L., ZHYDACHEVSKII, Y., eds. Oxide Materials for Electronic Engineering - Fabrication, Properties and Application, vol. 230. Solid State Phenomena. Pfaffikon: Scientific.Net, 2015, s. 3-7. Solid State Phenomena, 230. ISBN 978-3-03835-428-4. ISSN 1662-9779. Available: doi: 10.4028/www.scientific.net/SSP.230.3