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Some Other Gratings: Benchmarks for Large-Area E-Beam Nanopatterning
- 1.MELUZÍN, P., HORÁČEK, M., URBÁNEK, M., BOK, J., KRÁTKÝ, S., MATĚJKA, M., CHLUMSKÁ, J., KOLAŘÍK, V. Some Other Gratings: Benchmarks for Large-Area E-Beam Nanopatterning. In: NANOCON 2014. 6th International conference proceedings. Ostrava: TANGER, 2014. ISBN 978-80-87294-55-0.
Number of the records: 1