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Etching of glass microchips with supercritical water
- 1.KARÁSEK, P., GRYM, J., ROTH, M., PLANETA, J., FORET, F. Etching of glass microchips with supercritical water. Lab on a Chip. 2015, 15(1), 311-318. ISSN 1473-0197. E-ISSN 1473-0189. Available: doi: 10.1039/C4LC00843J
Number of the records: 1