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Influence of CO.sub.2./sub. concentration on diamond film morphology in pulsed linear antenna microwave plasma CVD system

  1. 1.
    DOMONKOS, M., IŽÁK, T., BABCHENKO, O., KROMKA, A., HRUŠKA, K. Influence of CO2 concentration on diamond film morphology in pulsed linear antenna microwave plasma CVD system. In: REMEŠ, Z., KROMKA, A., LEDINSKÝ, M., eds. Proceedings of the 2nd Winter Education Seminar. Praha: FZÚ AV ČR, 2011, s. 33-37. ISBN 978-80-260-0911-5.
Number of the records: 1  

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