Number of the records: 1
Time-resolved investigation of dual high power impulse magnetronsputtering with closed magnetic field during deposition of Ti–Cu thin films
- 1.STRAŇÁK, V., ČADA, M., HUBIČKA, Z., TICHÝ, M., HIPPLER, R. Time-resolved investigation of dual high power impulse magnetronsputtering with closed magnetic field during deposition of Ti–Cu thin films. Journal of Applied Physics. 2010, 108(4), 043305/1-043305/8. ISSN 0021-8979. E-ISSN 1089-7550. Available: doi: 10.1063/1.3467001.
Number of the records: 1