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Interferometric nanocomparator for calibrating precision displacement sensors
- 1.ČÍŽEK, M., BUCHTA, Z., MIKEL, B., LAZAR, J., ČÍP, O. Interferometric nanocomparator for calibrating precision displacement sensors. In: Interferometry XV: Applications (Proceedings of SPIE Vol. 7791). Bellingham: SPIE, 2010, 77910N: 1-7. ISBN 978-0-8194-8287-7.
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