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Impact wear resistance of silicon, oxygen and nitrogen containing amorphous carbon films deposited on steel substrates using PECVD
- 1.FOŘT, T., SOBOTA, J., GROSSMAN, J., BURSÍKOVÁ, V., DUPÁK, L., PEŘINA, V., KLAPETEK, P., BURŠÍK, J. Impact wear resistance of silicon, oxygen and nitrogen containing amorphous carbon films deposited on steel substrates using PECVD. In: DE URQUIJO, J., ed. ICPIG 2009 Conference Proceedings 29th International Conference on Phenomena in Ionized Gases. Cancún: ICPIG2009 Local Organizing Committee, 2009, PB13-13:1-4. ISBN 978-1-61567-694-1. Available: http://www.icpig2009.unam.mx/pdf/PB13-13.pdf
Number of the records: 1