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Profiling of N-type dopants in silicon structures

  1. 1.
    HOVORKA, M., MIKA, F., FRANK, L. Profiling of N-type dopants in silicon structures. In: MC 2009 - Microscopy Conference: First Joint Meeting of Dreiländertagung and Multinational Conference on Microscopy. Graz: Verlag der Technischen Universität, 2009, Vol. 1: 181-182. ISBN 978-3-85125-062-6. Available: http://www.univie.ac.at/asem/Graz_MC_09/papers/19923.pdf
Number of the records: 1  

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