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Measurements of plasma parameters during Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films deposition by double hollow cathode plasma jet system

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    OLEJNÍČEK, J., HUBIČKA, Z., VIROSTKO, P., DEYNEKA, A., JASTRABÍK, L., ADÁMEK, P., ŠÍCHA, M., TICHÝ, M., ŠÍCHOVÁ, H. Measurements of plasma parameters during BaxSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system. Czechoslovak Journal of Physics. 2006, 56(Suppl. B), B1283-B1289. ISSN 0011-4626.
Number of the records: 1