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Measurements of plasma parameters during Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films deposition by double hollow cathode plasma jet system

  1. 1.
    OLEJNÍČEK, J., HUBIČKA, Z., VIROSTKO, P., DEYNEKA, A., JASTRABÍK, L., ADÁMEK, P., ŠÍCHA, M., TICHÝ, M., ŠÍCHOVÁ, H. Measurements of plasma parameters during BaxSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system. Czechoslovak Journal of Physics. 2006, 56(Suppl. B), B1283-B1289. ISSN 0011-4626.
Number of the records: 1  

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