Deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films by double RF hollow cathode plasma jet system

HUBIČKA, Z., VIROSTKO, P., TICHÝ, M., ČADA, M., ADÁMEK, P., OLEJNÍČEK, J., DEYNEKA, A., CHURPITA, O., VALVODA, V., JASTRABÍK, L. Deposition of Ba_xSr_1-xTiO₃ thin films by double RF hollow cathode plasma jet system. Contributions to Plasma Physics. 2008, 48(5-7), 515-520. ISSN 0863-1042. E-ISSN 1521-3986. Available: doi: 10.1002/ctpp.200810083