RF Hollow Cathode Plasma Jet Deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. Films

IANNO, N.J., SOUKUP, R. J., HUBIČKA, Z., OLEJNÍČEK, J., ŠÍCHOVÁ, H. RF Hollow Cathode Plasma Jet Deposition of Ba_xSr_1-xTiO₃ Films. In: THEIL, A.J., BOHM, M., GARDNER, S.D., BLALOCK, T., eds. Materials, Integration and Technology for Monolithic Instruments. Pittsburgh: Warendale, PA, 2005, D2.4.1-D2.4.6. Material Research Society Symposium Proc, 869. ISBN 1-55899-823-3.