Temperature and ambient atmosphere dependent electrical characterization of sputtered IrO.sub.2./sub./TiO.sub.2./sub./IrO.sub.2./sub. capacitors

MAIER, F.J., SCHNEIDER, M., ARTEMENKO, Anna, KROMKA, Alexander, STOEGER-POLLACH, M., SCHMID, U. Temperature and ambient atmosphere dependent electrical characterization of sputtered IrO₂/TiO₂/IrO₂ capacitors. Journal of Applied Physics. 2022, 131(9), 095301. ISSN 0021-8979. E-ISSN 1089-7550. Available: doi: 10.1063/5.0080139.