In-situ plasma monitoring by optical emission spectroscopy during pulsed laser deposition of doped Lu.sub.2./sub.O.sub.3./sub.

IRIMICIUC, Stefan, MORE CHEVALIER, Joris, CHERTOPALOV, Sergii, FEKETE, Ladislav, NOVOTNÝ, Michal, HAVLOVÁ, Šárka, POUPON, Morgane, ZIKMUND, Tomáš, KŮSOVÁ, Kateřina, LANČOK, Ján. In-situ plasma monitoring by optical emission spectroscopy during pulsed laser deposition of doped Lu₂O₃. Applied Physics B-Lasers and Optics. 2021, 127(10), 140. ISSN 0946-2171. E-ISSN 1432-0649. Available: doi: 10.1007/s00340-021-07689-4.