Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography

ŠARBORT, Martin, HOLÁ, Miroslava, PAVELKA, Jan, ŘEŘUCHA, Šimon, OULEHLA, Jindřich, FOŘT, Tomáš, LAZAR, Josef. Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography. In: Imaging and Applied Optics Congress. Proceedings. Computational Optical Sensing and Imaging. Washington: OSA, 2020. ISBN 978-1-943580-77-4. Available: doi: 10.1364/DH.2020.HTh5H.2.