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The influence of Au-nanoparticles presence in PDMS on microstructures creation by ion beam lithography

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    ROMANENKO, Oleksandr V., SLEPIČKA, P., MALINSKÝ, Petr, CUTRONEO, Mariapompea, HAVRÁNEK, Vladimír, STAMMERS, James H., ŠVORČÍK, V., MACKOVÁ, Anna. The influence of Au-nanoparticles presence in PDMS on microstructures creation by ion beam lithography. Surface and Interface Analysis. 2020, 52(12), 1040-1044. ISSN 0142-2421. E-ISSN 1096-9918. Available: doi: 10.1002/sia.6821.
Number of the records: 1  

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