Slumping of Si wafers at high temperature

MÍKA, M., JANKOVSKÝ, O., ŠIMEK, P., LUTYAKOV, O., HAVLÍKOVÁ, R., ŠOFER, Z., HUDEC, René, PÍNA, L., INNEMAN, A., ŠVÉDA, L., MARŠÍKOVÁ, V. Slumping of Si wafers at high temperature. In: JUHA, L., BAJT, S., LONDON, R., HUDEC, R., PÍNA, L., eds. Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III. Bellingham: SPIE, 2013. Proceedings of SPIE, 8777. ISBN 9780819495792. Available: doi: 10.1117/12.2021586