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PEC Reliability in 3D E-beam DOE Nanopatterning
- 1.KRÁTKÝ, Stanislav, URBÁNEK, Michal, KOLAŘÍK, Vladimír. PEC Reliability in 3D E-beam DOE Nanopatterning. Microscopy and Microanalysis. 2015, 21(S4), 230-235. ISSN 1431-9276. E-ISSN 1435-8115. Available: doi: 10.1017/S1431927615013422
Number of the records: 1