Number of the records: 1
Exposure Time Comparison between E-beam Writer with Gaussian Beam and Variable Shaped Beam
- 1.HORÁČEK, Miroslav, KRÁTKÝ, Stanislav, URBÁNEK, Michal, KOLAŘÍK, Vladimír, MELUZÍN, Petr, MATĚJKA, Milan, CHLUMSKÁ, Jana. Exposure Time Comparison between E-beam Writer with Gaussian Beam and Variable Shaped Beam. In: NANOCON 2014. 6th International conference proceedings. Ostrava: TANGER, 2014. ISBN 978-80-87294-55-0.
Number of the records: 1