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Mask-free surface structuring of micro- and nanocrystalline diamond films by reactive ion plasma etching

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    DOMONKOS, Mária, IŽÁK, Tibor, BABCHENKO, Oleg, VARGA, Marián, HRUŠKA, Karel, KROMKA, Alexander. Mask-free surface structuring of micro- and nanocrystalline diamond films by reactive ion plasma etching. Advanced Science, Engineering and Medicine. 2014, 6(7), 780-784. ISSN 2164-6627. Available: doi: 10.1166/asem.2014.1573
Number of the records: 1  

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