Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates

KLEINER, A., SUCHANECK, G., ADOLPHI, B., GERLACH, G., LAVRENTIEV, V., HUBIČKA, Zdeněk, ČADA, Martin, JASTRABÍK, Lubomír, DEJNEKA, Alexandr. Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates. In: 2012 International Symposium on Applications of Ferroelectrics held jointly with 11th IEEE ECAPD and IEEE PFM (ISAF/ECAPD/PFM). New York: IEEE - Institute of Electrical and Electronics Engineers, 2012, s. 1-3. IEEE International Symposium on Applications of Ferroelecs. ISBN 978-1-4673-2669-8. ISSN 1099-4734.