Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering

SUCHANECK, G., LABITZKE, R., ADOLPHI, B., JASTRABÍK, Lubomír, ADÁMEK, Petr, DRAHOKOUPIL, Jan, HUBIČKA, Zdeněk, KISELEV, D.A., KHOLKIN, A. L., GERLACH, G., DEJNEKA, Alexandr. Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering. Surface and Coatings Technology. 2011, 205(2), S241-S244. ISSN 0257-8972. Available: doi: 10.1016/j.surfcoat.2011.02.050