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Laser interference nano-comparator for length sensor calibration in nanometric scale

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    ČÍP, Ondřej, MIKEL, Břetislav, ČÍŽEK, Martin, ŠMÍD, Radek, BUCHTA, Zdeněk, LAZAR, Josef. Laser interference nano-comparator for length sensor calibration in nanometric scale. In: 2nd International Conference NANOCON 2010. Ostrava: Tanger s.r.o, 2010, s. 274-277. ISBN 978-80-87294-19-2.
Number of the records: 1  

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