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Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina
- 1.POKORNÝ, Petr, BULÍŘ, Jiří, LANČOK, Ján, MUSIL, Jindřich, NOVOTNÝ, Michal. Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina. Plasma Processes and Polymers. 2010, 7(11), 910-914. ISSN 1612-8850. E-ISSN 1612-8869. Available: doi: 10.1002/ppap.201000064
Number of the records: 1