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Metrological SPM with positioning controlled by green light interferometry
- 1.LAZAR, Josef, KLAPETEK, P., ČÍP, Ondřej, ČÍŽEK, Martin, HRABINA, Jan, ŠERÝ, Mojmír. Metrological SPM with positioning controlled by green light interferometry. In: Fringe 2009 - 6th International Workshop on Advanced Optical Metrology. Heidelberg: Springer, 2009, s. 405-410. ISBN 978-3-642-03050-5.
Number of the records: 1