Number of the records: 1
Novel instrumentation for interferometric nanoscale comparator
- 1.ČÍŽEK, Martin, BUCHTA, Zdeněk, MIKEL, Břetislav, LAZAR, Josef, ČÍP, Ondřej. Novel instrumentation for interferometric nanoscale comparator. In: Optical Measurement Systems for Industrial Inspection VI. (Proceedings of SPIE Vol. 7389). Bellingham: SPIE, 2009, 73982Y: 1-7. ISBN 978-0-8194-7672-2. ISSN 0277-786X. Available: doi: 10.1117/12.827515
Number of the records: 1